@misc{indiciae320b5385fbb9,
  title = {C/ SiO2 / Si thin film thicknesses using EPMA and a cold finger.},
  author = {Boro, Joseph and Xu, Guangping},
  year = {2022},
  doi = {10.2172/2004147},
  url = {https://www.osti.gov/biblio/2004147},
  note = {Source identifier: 2004147}
}