TY  - RPRT
TI  - C/ SiO2 / Si thin film thicknesses using EPMA and a cold finger.
AU  - Boro, Joseph
AU  - Xu, Guangping
PY  - 2022
DO  - 10.2172/2004147
UR  - https://www.osti.gov/biblio/2004147
ID  - 2004147
ER  -