@misc{indiciae322c4775aecc,
  title = {Local stress measurements in microelectronic devices using HREBSD.},
  author = {Ruggles, Timothy and Grutzik, Scott and Michael, Joseph Richard},
  year = {2022},
  doi = {10.2172/2004152},
  url = {https://www.osti.gov/biblio/2004152},
  note = {Source identifier: 2004152}
}