TY  - RPRT
TI  - Local stress measurements in microelectronic devices using HREBSD.
AU  - Ruggles, Timothy
AU  - Grutzik, Scott
AU  - Michael, Joseph Richard
PY  - 2022
DO  - 10.2172/2004152
UR  - https://www.osti.gov/biblio/2004152
ID  - 2004152
ER  -