@misc{indiciae389512940c40, title = {Investigating Microscale RF Discharge Sensitivity to Ion Transport.}, author = {Moore, Christopher and Ruyack, Alexander and Jordan, Matthew and Kramer, Jack and Bingham, Andrew and Hummel, Gwendolyn and Herrera, Sergio and Ballance, Mark and Schiess, Adrian and Nordquist, Christopher}, year = {2022}, doi = {10.2172/2004277}, url = {https://www.osti.gov/biblio/2004277}, note = {Source identifier: 2004277} }