@misc{indiciae852b81230c88,
  title = {Integrating atomic layer doping (ALDo) with CMOS circuitry for reduced contact resistance.},
  author = {Anderson, Evan and Schmucker, Scott and Ivie, Jeffrey and Campbell, DeAnna and Lu, Tzu-Ming and Lu, Ping and Bussmann, Ezra and Leenheer, Andrew and Scrymgeour, David and Misra, Shashank},
  year = {2022},
  doi = {10.2172/2005678},
  url = {https://www.osti.gov/biblio/2005678},
  note = {Source identifier: 2005678}
}