@misc{indiciae6756ae7e6865,
  title = {Determination of FDTR Lateral Resolution for Heterogeneously Integrated Micro Electronics.},
  author = {Herkenhoff, Brenden and Hodges, Wyatt and Treweek, Benjamin and Jarzembski, Amun and Walsh, Timothy and Pickrell, Gregory},
  year = {2022},
  doi = {10.2172/2005889},
  url = {https://www.osti.gov/biblio/2005889},
  note = {Source identifier: 2005889}
}