TY  - RPRT
TI  - Determination of FDTR Lateral Resolution for Heterogeneously Integrated Micro Electronics.
AU  - Herkenhoff, Brenden
AU  - Hodges, Wyatt
AU  - Treweek, Benjamin
AU  - Jarzembski, Amun
AU  - Walsh, Timothy
AU  - Pickrell, Gregory
PY  - 2022
DO  - 10.2172/2005889
UR  - https://www.osti.gov/biblio/2005889
ID  - 2005889
ER  -