@misc{indiciae8f046b223344,
  title = {Direct Integration of Atomic Precision Devices into a MOS-Compatible Process.},
  author = {Ivie, Jeffrey and Campbell, DeAnna and Leenheer, Andrew and Halsey, Connor and Anderson, Evan and Schmucker, Scott and Scrymgeour, David and Gao, Xujiao and Lepkowski, William and Lu, Tzu-Ming and Tracy, Lisa and Misra, Shashank},
  year = {2022},
  doi = {10.2172/2006067},
  url = {https://www.osti.gov/biblio/2006067},
  note = {Source identifier: 2006067}
}