@misc{indiciae0e21e1f4d59b,
  title = {Automating Experiments Using Charged Particle Beam Nanofabrication Tools.},
  author = {Belianinov, Alex and Titze, Michael and Jonathan, Poplawsky and Bielejec, Edward},
  year = {2022},
  doi = {10.2172/2006266},
  url = {https://www.osti.gov/biblio/2006266},
  note = {Source identifier: 2006266}
}