@misc{indiciae801dcc1bcfae, title = {Low-Energy Ion Implantation - Range Comparisons between Theory and Experiment.}, author = {Titze, Michael and Belianinov, Alex and Bielejec, Edward}, year = {2022}, doi = {10.2172/2006290}, url = {https://www.osti.gov/biblio/2006290}, note = {Source identifier: 2006290} }