TY  - RPRT
TI  - Low-Energy Ion Implantation - Range Comparisons between Theory and Experiment.
AU  - Titze, Michael
AU  - Belianinov, Alex
AU  - Bielejec, Edward
PY  - 2022
DO  - 10.2172/2006290
UR  - https://www.osti.gov/biblio/2006290
ID  - 2006290
ER  -