@misc{indiciaed826b4a7f674,
  title = {Nanometer flat blazed x-ray gratings using ion beam figure correction},
  author = {Voronov, D. L. and Wang, T. (ORCID:0000000168808194) and Park, S. and Huang, L. (ORCID:0000000256455173) and Gullikson, E. M. and Salmassi, F. and Austin, C. and Padmore, H. A. and Idir, M.},
  year = {2023},
  doi = {10.1364/oe.501418},
  url = {https://www.osti.gov/biblio/2007235},
  note = {Source identifier: 2007235}
}