@misc{indiciae1f44c61f0554,
  title = {Machine learning and atomic layer deposition: Predicting saturation times from reactor growth profiles using artificial neural networks},
  author = {Yanguas-Gil, Angel and Elam, Jeffrey W.},
  year = {2022},
  doi = {10.1116/6.0001973},
  url = {https://www.osti.gov/biblio/2007750},
  note = {Source identifier: 2007750}
}