TY  - RPRT
TI  - Machine learning and atomic layer deposition: Predicting saturation times from reactor growth profiles using artificial neural networks
AU  - Yanguas-Gil, Angel
AU  - Elam, Jeffrey W.
PY  - 2022
DO  - 10.1116/6.0001973
UR  - https://www.osti.gov/biblio/2007750
ID  - 2007750
ER  -