TY  - RPRT
TI  - Micron-focused ion beamlets
AU  - Chowdhury, Abhishek
AU  - Bhattacharjee, Sudeep
PY  - 2010
DO  - 10.1063/1.3371688
UR  - https://www.osti.gov/biblio/21476176
ID  - 21476176
ER  -