@misc{indiciaee4ccb8aea5ae,
  title = {Multiscale characterization method for line edge roughness based on redundant second generation wavelet transform},
  author = {Fei, Wang and Xuezeng, Zhao and Ning, Li},
  year = {2010},
  doi = {10.1063/1.3492618},
  url = {https://www.osti.gov/biblio/21476565},
  note = {Source identifier: 21476565}
}