TY  - RPRT
TI  - Multiscale characterization method for line edge roughness based on redundant second generation wavelet transform
AU  - Fei, Wang
AU  - Xuezeng, Zhao
AU  - Ning, Li
PY  - 2010
DO  - 10.1063/1.3492618
UR  - https://www.osti.gov/biblio/21476565
ID  - 21476565
ER  -