@misc{indiciaee0d17f3899bc,
  title = {Quality Control On Strained Semiconductor Devices},
  author = {Dommann, Alex and Neels, Antonia},
  year = {2010},
  doi = {10.1063/1.3527114},
  url = {https://www.osti.gov/biblio/21506805},
  note = {Source identifier: 21506805}
}