@misc{indiciaed3324c0f05cc,
  title = {N- and P-Type Cluster Source},
  author = {Horsky, Thomas N and Hahto, Sami K and McIntyre, Edward K and Sacco, Jr, George P},
  year = {2011},
  doi = {10.1063/1.3548447},
  url = {https://www.osti.gov/biblio/21510123},
  note = {Source identifier: 21510123}
}