@misc{indiciae7babaf2a99ae,
  title = {Method For Silicon Surface Texturing Using Ion Implantation},
  author = {Kadakia, Nirag and Naczas, Sebastian and Bakhru, Hassaram and Mengbing, Huang},
  year = {2011},
  doi = {10.1063/1.3586115},
  url = {https://www.osti.gov/biblio/21513375},
  note = {Source identifier: 21513375}
}