@misc{indiciaeccccbbfa0dc7,
  title = {Interference pattern generation in evanescent electromagnetic waves for nanoscale lithography using waveguide diffraction gratings},
  author = {Bezus, E A and Doskolovich, L L and Kazanskii, N L},
  year = {2011},
  doi = {10.1070/qe2011v041n08abeh014500},
  url = {https://www.osti.gov/biblio/21552632},
  note = {Source identifier: 21552632}
}