TY  - RPRT
TI  - Interference pattern generation in evanescent electromagnetic waves for nanoscale lithography using waveguide diffraction gratings
AU  - Bezus, E A
AU  - Doskolovich, L L
AU  - Kazanskii, N L
PY  - 2011
DO  - 10.1070/qe2011v041n08abeh014500
UR  - https://www.osti.gov/biblio/21552632
ID  - 21552632
ER  -