@misc{indiciaeb039fdcbb82f,
  title = {Nonsputtering impulse magnetron discharge},
  author = {Khodachenko, G V and Mozgrin, D V and Fetisov, I K and Stepanova, T V},
  year = {2012},
  doi = {10.1134/s1063780x1112004x},
  url = {https://www.osti.gov/biblio/22047436},
  note = {Source identifier: 22047436}
}