@misc{indiciae1f612af967e4,
  title = {Hollow target magnetron-sputter-type solid material ion source},
  author = {Sasaki, D and Ieki, S and Kasuya, T and Wada, M},
  year = {2012},
  doi = {10.1063/1.3672474},
  url = {https://www.osti.gov/biblio/22068787},
  note = {Source identifier: 22068787}
}