TY  - RPRT
TI  - Hollow target magnetron-sputter-type solid material ion source
AU  - Sasaki, D
AU  - Ieki, S
AU  - Kasuya, T
AU  - Wada, M
PY  - 2012
DO  - 10.1063/1.3672474
UR  - https://www.osti.gov/biblio/22068787
ID  - 22068787
ER  -