@misc{indiciae37988591b905,
  title = {Multi-cusp ion source for Gen 5.5 doping system},
  author = {Inouchi, Yutaka and Matsumoto, Takeshi and Dohi, Shojiro and Tanii, Masahiro and Takahashi, Genki and Imai, Katsuharu and Nishimura, Ippei and Tatemichi, Junichi and Konishi, Masashi and Naito, Masao},
  year = {2012},
  doi = {10.1063/1.4766555},
  url = {https://www.osti.gov/biblio/22075715},
  note = {Source identifier: 22075715}
}