@misc{indiciae21db5bb598a3,
  title = {Generating electron cyclotron resonance plasma using distributed scheme},
  author = {Huang, C. C. and Chang, T. H. and Chen, N. C. and Chao, H. W. and Chen, C. C. and Chou, S. F.},
  year = {2012},
  doi = {10.1063/1.4745189},
  url = {https://www.osti.gov/biblio/22089356},
  note = {Source identifier: 22089356}
}