@misc{indiciaebc692ffff083,
  title = {Oxygen diffusivity in silicon derived from dynamical X-ray diffraction},
  author = {Will, J. and Groeschel, A. and Bergmann, C. and Steinrueck, H. -G. and Magerl, A. and Kot, D. and Schubert, M. A. and Kissinger, G.},
  year = {2013},
  doi = {10.1063/1.4792747},
  url = {https://www.osti.gov/biblio/22102273},
  note = {Source identifier: 22102273}
}