@misc{indiciae0016563b7f5b,
  title = {Electron caustic lithography},
  author = {Kennedy, S. M. and Zheng, C. X. and Tang, W. X. and Paganin, D. M. and Jesson, D. E. and Fu, J.},
  year = {2012},
  doi = {10.1063/1.4730139},
  url = {https://www.osti.gov/biblio/22107630},
  note = {Source identifier: 22107630}
}