@misc{indiciae35473faf354f,
  title = {Three dimensional vertically structured electronic devices},
  author = {Conway, Adam and Harrison, Sara Elizabeth and Nikolic, Rebecca and Shao, Qinghui and Voss, Lars},
  year = {2023},
  url = {https://www.osti.gov/biblio/2222239},
  note = {Source identifier: 2222239}
}