@misc{indiciae3e0b5e9950db,
  title = {Tungsten diffusion in silicon},
  author = {De Luca, A. and Texier, M. and Burle, N. and Oison, V. and Pichaud, B. and Grosjean, C.},
  year = {2014},
  doi = {10.1063/1.4859455},
  url = {https://www.osti.gov/biblio/22271302},
  note = {Source identifier: 22271302}
}