@misc{indiciae7786e64294aa,
  title = {Microcantilevers with embedded accelerometers for dynamic atomic force microscopy},
  author = {Shaik, Nurul Huda and Raman, Arvind and Reifenberger, Ronald G.},
  year = {2014},
  doi = {10.1063/1.4866664},
  url = {https://www.osti.gov/biblio/22293081},
  note = {Source identifier: 22293081}
}