TY - RPRT TI - Microcantilevers with embedded accelerometers for dynamic atomic force microscopy AU - Shaik, Nurul Huda AU - Raman, Arvind AU - Reifenberger, Ronald G. PY - 2014 DO - 10.1063/1.4866664 UR - https://www.osti.gov/biblio/22293081 ID - 22293081 ER -