@misc{indiciaedf9f6d48f7cf,
  title = {High precision two-dimensional strain mapping in semiconductor devices using nanobeam electron diffraction in the transmission electron microscope},
  year = {2014},
  doi = {10.1063/1.4886137},
  url = {https://www.osti.gov/biblio/22303399},
  note = {Source identifier: 22303399}
}