@misc{indiciae5b520f046dd2,
  title = {Geometry optimization for micro-pressure sensor considering dynamic interference},
  author = {Yu, Zhongliang and Zhao, Yulong and Li, Lili and Tian, Bian and Li, Cun},
  year = {2014},
  doi = {10.1063/1.4895999},
  url = {https://www.osti.gov/biblio/22314284},
  note = {Source identifier: 22314284}
}