TY  - RPRT
TI  - Geometry optimization for micro-pressure sensor considering dynamic interference
AU  - Yu, Zhongliang
AU  - Zhao, Yulong
AU  - Li, Lili
AU  - Tian, Bian
AU  - Li, Cun
PY  - 2014
DO  - 10.1063/1.4895999
UR  - https://www.osti.gov/biblio/22314284
ID  - 22314284
ER  -