@misc{indiciae9af61d7709e4,
  title = {Atomic and molecular layer deposition for surface modification},
  author = {Vähä-Nissi, Mika and Sievänen, Jenni and Salo, Erkki and Heikkilä, Pirjo and Kenttä, Eija and Johansson, Leena-Sisko and Koskinen, Jorma T. and Harlin, Ali},
  year = {2014},
  doi = {10.1016/j.jssc.2013.11.040},
  url = {https://www.osti.gov/biblio/22334237},
  note = {Source identifier: 22334237}
}