@misc{indiciaeb84aa3a4699d,
  title = {Surface and material analytics based on Dresden-EBIS platform technology},
  author = {Bischoff, L. and Pilz, W. and Zschornack, G.},
  year = {2015},
  doi = {10.1063/1.4905403},
  url = {https://www.osti.gov/biblio/22390857},
  note = {Source identifier: 22390857}
}