@misc{indiciae5f9d07e3cbc7, title = {AETHER: A simulation platform for inductively coupled plasma}, author = {Turkoz, Emre and Celik, Murat}, year = {2015}, doi = {10.1016/j.jcp.2015.01.027}, url = {https://www.osti.gov/biblio/22465615}, note = {Source identifier: 22465615} }