TY  - RPRT
TI  - AETHER: A simulation platform for inductively coupled plasma
AU  - Turkoz, Emre
AU  - Celik, Murat
PY  - 2015
DO  - 10.1016/j.jcp.2015.01.027
UR  - https://www.osti.gov/biblio/22465615
ID  - 22465615
ER  -