@misc{indiciae34a82c061ab7, title = {Quantitative Scanning Transmission Electron Microscopy for Materials Science: Imaging, Diffraction, Spectroscopy, and Tomography}, author = {Ophus, Colin}, year = {2023}, doi = {10.1146/annurev-matsci-080921-092646}, url = {https://www.osti.gov/biblio/2246863}, note = {Source identifier: 2246863} }