@misc{indiciaec29b8e227dc2,
  title = {Mitigating challenges in aberration-corrected electron-beam lithography on electron-opaque substrates},
  author = {Camino, Fernando E. and Tiwale, Nikhil and Hwang, Sooyeon and Du, Xu and Yang, Judith C.},
  year = {2023},
  doi = {10.1088/1361-6528/ad0908},
  url = {https://www.osti.gov/biblio/2246882},
  note = {Source identifier: 2246882}
}