@misc{indiciaea2409ccaecf5,
  title = {Dynamics of plasma atomic layer etching: Molecular dynamics simulations and optical emission spectroscopy},
  author = {Vella, Joseph R. and Hao, Qinzhen and Donnelly, Vincent M. and Graves, David B.},
  year = {2023},
  doi = {10.1116/6.0003011},
  url = {https://www.osti.gov/biblio/2248044},
  note = {Source identifier: 2248044}
}