TY  - RPRT
TI  - Dynamics of plasma atomic layer etching: Molecular dynamics simulations and optical emission spectroscopy
AU  - Vella, Joseph R.
AU  - Hao, Qinzhen
AU  - Donnelly, Vincent M.
AU  - Graves, David B.
PY  - 2023
DO  - 10.1116/6.0003011
UR  - https://www.osti.gov/biblio/2248044
ID  - 2248044
ER  -