@misc{indiciaec0f2ebff6702,
  title = {Development of Miniaturized High Temperature Multi Process Monitoring System},
  author = {Shim, Hong-Shig and Beutler, Jacob and Davis, Kevin and Chiodo, Andrew},
  year = {2020},
  doi = {10.2172/2248093},
  url = {https://www.osti.gov/biblio/2248093},
  note = {Source identifier: 2248093}
}