@misc{indiciae13b7349c502d,
  title = {CMOS-compatible method for doping of buried vertical polysilicon structures by solid phase diffusion},
  author = {Turkulets, Yury and Silber, Amir and Ripp, Alexander and Sokolovsky, Mark and Shalish, Ilan},
  year = {2016},
  doi = {10.1063/1.4944778},
  url = {https://www.osti.gov/biblio/22591502},
  note = {Source identifier: 22591502}
}