TY  - RPRT
TI  - CMOS-compatible method for doping of buried vertical polysilicon structures by solid phase diffusion
AU  - Turkulets, Yury
AU  - Silber, Amir
AU  - Ripp, Alexander
AU  - Sokolovsky, Mark
AU  - Shalish, Ilan
PY  - 2016
DO  - 10.1063/1.4944778
UR  - https://www.osti.gov/biblio/22591502
ID  - 22591502
ER  -