@misc{indiciae14ba395cf3f8,
  title = {Cleaner Chips: Decarbonization in Semiconductor Manufacturing},
  author = {Nagapurkar, Prashant (ORCID:0000000285406717) and Nandy, Paulomi and Nimbalkar, Sachin},
  year = {2023},
  doi = {10.3390/su16010218},
  url = {https://www.osti.gov/biblio/2263319},
  note = {Source identifier: 2263319}
}