TY  - RPRT
TI  - Cleaner Chips: Decarbonization in Semiconductor Manufacturing
AU  - Nagapurkar, Prashant (ORCID:0000000285406717)
AU  - Nandy, Paulomi
AU  - Nimbalkar, Sachin
PY  - 2023
DO  - 10.3390/su16010218
UR  - https://www.osti.gov/biblio/2263319
ID  - 2263319
ER  -